Series II Standard Mass Flow Controller | Parker NA
687821
687821

Series II Standard Mass Flow Controller

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Our Series II mass flow controllers & meters offer outstanding value in a wide range of applications. Exceptional accuracy for flow ranges from 0.014 sccm to 1,670 slpm, all with optional multi-gas and multi-range capability for maximum flexibility.

Our Series II mass flow controllers & meters offer outstanding value in a wide range of applications. Exceptional accuracy for flow ranges from 0.014 sccm to 1,670 slpm, all with optional multi-gas and multi-range capability for maximum flexibility.

Use our configurator to build the right part for your application.
Description

    Parker's highly precise mass flow controllers provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability.  Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow controller is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus.  If you're not sure what gas you're going to use or your process changes, our MFC allows you to migrate to a new gas within your flow range without purchasing a new mass flow controller.

    Markets:
    • Laboratory and Process Instrumentation
    • Pharma/Bio-Pharma Equipment
    • Air Quality Monitoring System
    • Furnace and Coatings

    Features/Benefits:
    • Fast, Repeatable and Reliable Performance
    • Premium Accuracy with Proven Thermal Mass Flow Sensor and Laminar Flow Element
    • Easy to integrate into your new or existing systems
    • Asset calibration management software included
    • Cleaned for analytical use
    • Fails shut with Normally Closed Valve for safe operation
    • CE, REACH and RoHS II

    Applications:
    • Gas Control for Laboratory and Process Equipment
    • Burner Ratio Control for Ceramics and Metals
    • Process and Environmental Analyzers
    • Emissions Monitors and Calibrators

Description

Performance Characteristics

Flow Rate

Up to 1670 L/min

Pressure Control Range

928 PSIA - 1450 PSIA

Connection Type

Compression, Face Seal Male, None, Other

Connection Size

1/8"-1/2" | 6 mm - 20 mm

Communication Interface

Analog or digital: RS-232, DeviceNet, Profibus-DP, Modbus-RTU

Valve Type

Normally Open, Normally Closed

Seal Material

EPDM, Kalrez, Viton (Standard)

Body Material

316L Stainless Steel

Flow Rate Accuracy

Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)

Turndown Ratio

1 : 50 (in digital mode up to 1 : 187.5)

Repeatability

< 0.2% reading

Settling Time

Standard: 2 - 4 seconds

Control Stability

< ±0.1% Full Scale (typical for 1 l/min N2)

Maximum Operating Temperature

70 °C

Minimum Operating Temperature

-10 °C

Temperature Coefficient

Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C

Pressure Coefficient

0.1 ATM typical N2; 0.01% / ATM typical H2 ATM

Leak Rate

Tested < 2 x 10-9 mbar l/s He L/sec

Attitude Sensitivity

Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2

Warm-Up Time

30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale

Wetted Material

316L Stainless Steel

Surface Finish

0.8 µm typical

Connection Material

316L Stainless Steel

Specifications Met

IP40

Power Supply Voltage

+15 - 24 Vdc

Power Consumption

Max. 320 mA; Add 50 mA Profibus, if applicable

Electrical Connection

9-PIN D-Connector

FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE. This document and other information from Parker-Hannifin Corporation, its subsidiaries and authorized distributors provide product or system options for further investigation by users having technical expertise. The user, through its own analysis and testing, is solely responsible for making the final selection of the system and components and assuring that all performance, endurance, maintenance, safety and warning requirements of the application are met. The user must analyze all aspects of the application, follow applicable industry standards, and follow the information concerning the product in the current product catalog and in any other materials provided from Parker or its subsidiaries or authorized distributors. To the extent that Parker or its subsidiaries or authorized distributors provide component or system options based upon data or specifications provided by the user, the user is responsible for determining that such data and specifications are suitable and sufficient for all applications and reasonably foreseeable uses of the components or systems...

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