Name: Ultra High Purity Gas Regulators
Brand: Parker

Ultra High Purity Gas Regulators

SMSQ2Micro Series pressure regulators are designed for UHP applications requiring precision pressure control in a small envelope. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.

The HF1200W & HFT1200W Series regulator is designed for UHP gas delivery and offers high flow capability with an inlet pressure up to 1,250 psig. The combined high flow and high inlet pressure increases the application range of the regulator.

The SQ Series of regulators are high flow, high performance point-of-use regulators designed to be used in process gas cabinets for gas companies, equipment manufacturers and end users.

Global FRL Regulators provide quick and accurate pressure regulation for the majority of industrial applications. These regulators come in standard, common port and semi-precision options.

The QR4000 & NPR4000 are excellent choices for gas cabinets and bulk gas distribution. Designed for enhanced leak integrity and for applications involving negative delivery pressures.

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

EPP4 programmable electronic proportional regulator allows for regulation of outlet pressure proportionally to an electrical control signal.  This unit utilizes a user friendly Calys software to configure all parameters.

SQ2Micro regulators are designed for UHP point-of-use applications requiring precision pressure control in a small form factor. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.

EPP4 high pressure programmable electronic proportional regulator allows for regulation of outlet pressure proportionally to an electrical control signal.  This unit utilizes a user friendly Calys software to configure all parameters.

The 17R Series Diaphragm Valve provides excellent leak integrity and is ideal for use in UHP bulk delivery and specialty gas systems. Available in configurations with flow capacities up to 0.80 Cv and working pressures up to 3,000 psig.

The 18R Series Diaphragm Valve provides excellent leak integrity and is ideal for use in UHP bulk delivery and specialty gas systems. Available in configurations with flow capacities up to 1.30 Cv and working pressures up to 1,500 psig.

14R non-modular mini regulators provide a convenient and low cost method to reduce a supplied air pressure to desired outlet pressure. 14R provides quick and accurate pressure regulation for the majority of industrial applications.

The 945 Series Diaphragm Valve provides excellent reliability and leak integrity, making it ideal for use in UHP applications. Available in configurations with flow capacities up to 0.25 Cv and working pressures up to 3,500 psig.

The Porter Model 415 & 425 Electronic Pressure Regulators combine the proven Porter EPC Electronic Proportional Control Valve with an integrally-mounted pressure sensor and the necessary electronics for self-contained closed-loop pressure control.

The ABP1 Series is a back pressure regulator designed for use in gas delivery systems to maintain a specified upstream pressure. It is capable of meeting a wide range of back pressure control applications.

15R non-modular economy regulators provide a convenient and low cost method to reduce a supplied air pressure to desired outlet pressure. 15R provides quick and accurate pressure regulation for the majority of industrial applications.

The FR1200 Series Tied-diaphragm Regulator offers high flow and excellent leak integrity at inlet pressures up to 1,700 psig. It has a low spring rate for high sensitivity and is ideal for ultra-high purity bulk and specialty gas delivery systems.

The ABP3 Series is a high sensitivity back pressure regulator designed for use in gas delivery systems to maintain a specified upstream pressure. It is capable of meeting a wide range of back pressure control applications.

The IR4000W is a versatile welded stainless steel regulator for both high and low pressure applications, controlling a broad range of corrosive and non-corrosive gases with process proven field reliability.

The IR6000 Series Regulator provides two stages of pressure reducing regulation for optimum outlet pressure control and is the preferred choice where there is a potential for large inlet pressure changes.

959W Series Tied-diaphragm Pressure Regulators are designed for high-pressure UHP applications. The series offers excellent reliability and leak integrity, and is ideal for use in gas cabinets, valve manifold boxes, and upstream process lines.

The BFR5K Series pressure regulator offers high flow in a compact package. Its patented design minimizes outlet pressure fluctuation due to changes in supply pressure, making it ideal for use in UHP bulk gas delivery systems (flows up to 5000 slpm).

R34 non-modular mini regulators provide a convenient and low cost method to reduce a supplied air pressure to desired outlet pressure. R34 provides quick and accurate pressure regulation for the majority of industrial applications.

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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