The Parker 930 Series stainless steel body diaphragm valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

The 930 Series’ thread-less and spring-less design minimizes particle generation and entrapment areas for reduced process contamination. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life over millions of cycles. All wetted components are manufactured from specialty metals to provide exceptional corrosion resistance and leak integrity. The internally electropolished VeriClean™ 316L stainless steel body and high strength Cobalt based alloy diaphragm allow it to surpass the industry standard Semi F20 specification. The variety of available seat materials: PCTFE, PEEK® and Vespel® to allow the 930 series to operate at many different temperatures and with a wide range of process fluids. These materials combined with the exacting design features afford the 930 Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 300 psig.

All 930 Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat, and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:

• Semiconductor

• Analytical Laboratory

• Pharmaceutical

• BioPharm

• Aerospace

• Industrial

Applications:

• Corrosive and specialty gases

• Semiconductor Tools

• Tool Hook-ups

• Gas Cabinets

• Valve Manifold Boxes (VMB)

Features/Benefits:

• 5 micro inch (Ra) electropolish surface finish on wetted surfaces

• High cycle life (including corrosive service)

• Internally springless and threadless design minimizes particle generation and gas entrapment

• Variety of configurations offered in air-operated and manual

• Fully functional from vacuum to 300 psig

• Internal leak rate: ≤ 1 x 10-9 scc/sec He

• External leak rate: ≤ 2 x 10-10 scc/sec He

• 75 psig nominal AOP actuation pressure

VeriClean – TM Parker Hannifin Corporation, Veriflo Division

Vespel – TM DuPont Performance Elastomers L.L.C.

Peek – TM Victrex plc.

Ultra-High Purity (UHP) Low Flow, Low Pressure Diaphragm Valve – 930 Series