Fluorocap Filter Capsule | All-fluoropolymer capsule for aggressive wet etch and clean applications | Product Series

Filter by

    No filters selected

Style

Options

Maximum Working Temperature (C)

Length (inch)

Connection

Vent Type

Micron Rating

Get your Parker account Today!

Create one account to manage everything you do with Parker, from your shopping preferences to your application access.


LOADING IMAGES
Fluorocap Filter Capsule | All-fluoropolymer capsule for aggressive wet etch and clean applications

Fluorocap Filter Capsule | All-fluoropolymer capsule for aggressive wet etch and clean applications

Where to Buy

The Fluorocap® encapsulated filter cartridge is our standard product for aggressive wet etch and clean applications. The Fluorocap® encapsulated filter cartridge provides good flow rates and on-stream life at an economical price.

Technical Specifications

  • Brand: Parker
  • Industry: Microelectronics
  • Function: Clarification, Prefiltration, Polishing
  • Media: PTFE
  • Filter Construction: Pleated Membrane
  • Flow Rate: 2 gal/min (gpm/psid) per 4 inch at 0.2 Micron, 1.5 gal/min (gpm/psid) per 4 inch at 0.1 Micron, 4.4 gal/min (gpm/psid) per 4 inch at 0.2 Micron, 0.7 gal/min (gpm/psid) per 4 inch at 0.05 Micron, 3.2 gal/min (gpm/psid) per 4 inch at 0.45 Micron, 4.1 gal/min (gpm/psid) per 10 inch at 0.2 Micron, 1.5 gal/min (gpm/psid) per 1
  • Filter Area: 4.8 ft2, 9.8 ft2
  • Materials of Construction: PFA
  • Hose Reinforcement Material & Structure: PFA
Safety Warning

Full Product Description

The Fluorocap® encapsulated filter cartridge is our standard product for aggressive wet etch and clean applications. It provides good flow rates and on-stream life at an economical price. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.
Features/Benefits
• Economical
• Wide range of configurations and ratings
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean filtration for:
–  Hot phosphoric acid
–  Sulfuric acid
–  Hydrofluoric acid
–  Nitric acid
–  Piranha
–  SC1, SC2
–  NMP-based solvents
• Filtration for other high temperature or ozonated processes

Related Documents

Literature and Reference Materials
[CATALOG]-Filtration Products for Microelectronics Applications
[DATASHEET]-Fluorocap Encapsulated Filter
[LINECARD]-Filtration Products for Microelectronics Applications
[USER GUIDE]-Fluorocap Membrane Capsule
Selector Guides
Microelectronics Filtration Applications Interactive
×
View Catalog
Share / Email
Print
Products Style Options Maximum Working Temperature (C) Length (inch) Connection Vent Type Micron Rating
FC-H01GS-002 In-Line Dry Packed Up to 180 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare Same Side 0.2
FC-C01FD-002 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.2
FC-C01GD-001 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare 180 degrees opposite side 0.1
FC-C01GS-010 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare Same Side 1
FC-C01GS-925 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare Same Side 0.05
FC-C01HD-010 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 1/2 inch Parflare 180 degrees opposite side 1
FC-C01HS-002 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 1/2 inch Parflare Same Side 0.2
FC-C01HS-010 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 1/2 inch Parflare Same Side 1
FC-C01PD-002 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch MNPT 180 degrees opposite side 0.2
FC-C01PD-004 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch MNPT 180 degrees opposite side 0.45
FC-C01PD-010 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch MNPT 180 degrees opposite side 1
FC-C01PD-925 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch MNPT 180 degrees opposite side 0.05
FC-C01PS-010 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch MNPT Same Side 1
FC-C01PS-925 In-Line Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch MNPT Same Side 0.05
FC-C11FD-002 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.2
FC-C11FD-925 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.05
FC-C11FS-010 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare Same Side 1
FC-C11HD-001 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 1/2 inch Parflare 180 degrees opposite side 0.1
FC-C11HS-001 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 1/2 inch Parflare Same Side 0.1
FC-C11HS-002 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 1/2 inch Parflare Same Side 0.2
FC-C11HS-004 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 1/2 inch Parflare Same Side 0.45
FC-C11HS-010 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 1/2 inch Parflare Same Side 1
FC-C11JD-002 In-Line Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Flarelock 180 degrees opposite side 0.2
FC-H01HS-002 In-Line Dry Packed Up to 180 4 inch Cartridge in a 9 inch Capsule 1/2 inch Parflare Same Side 0.2
FC-H11FD-002 In-Line Dry Packed Up to 180 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.2
FW-C01FD-001 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.1
FW-C01GD-923 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare 180 degrees opposite side 0.03
FW-C01GD-925 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare 180 degrees opposite side 0.05
FW-C01GS-925 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare Same Side 0.05
FW-C01KD-001 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch Pillar at 90 degrees 180 degrees opposite side 0.1
FW-C01TD-002 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 0.5 inch Parflare 180 degrees opposite side 0.2
FW-C11FD-001 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.1
FW-C11FD-925 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.05
FW-C11HD-001 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 1/2 inch Parflare 180 degrees opposite side 0.1
FW-C11HD-010 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 1/2 inch Parflare 180 degrees opposite side 1
FW-C11KD-002 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar at 90 degrees 180 degrees opposite side 0.2
FW-C11KD-010 In-Line Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar at 90 degrees 180 degrees opposite side 1
FW-H11FD-001 In-Line Ozonated UPW Flushed and Wet Packed Up to 180 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.1
FW-H11FD-925 In-Line Ozonated UPW Flushed and Wet Packed Up to 180 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare 180 degrees opposite side 0.05
TC-C01GC-925 T-Style Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/8 inch Parflare Centered 0.05
TC-C01WC-002 T-Style Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch Pillar Centered 0.2
TC-C01YC-001 T-Style Dry Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch Super Pillar 300 Centered 0.1
TC-C11FC-001 T-Style Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare Centered 0.1
TC-C11FC-004 T-Style Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare Centered 0.45
TC-C11WC-001 T-Style Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar Centered 0.1
TC-C11WC-002 T-Style Dry Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar Centered 0.2
TC-H11JC-004 T-Style Dry Packed Up to 180 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Flarelock Centered 0.45
TW-C01FC-001 T-Style Ozonated UPW Flushed and Wet Packed Up to 150 4 inch Cartridge in a 9 inch Capsule 3/4 inch Parflare Centered 0.1
TW-C11FC-925 T-Style Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Parflare Centered 0.05
TW-C11WC-002 T-Style Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar Centered 0.2
TW-C11WC-925 T-Style Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar Centered 0.05
TW-H11JC-002 T-Style Ozonated UPW Flushed and Wet Packed Up to 180 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Flarelock Centered 0.2
LW-C11WC-001 L Style Ozonated UPW Flushed and Wet Packed Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar Centered 0.1
TU-C11WC-923 T-Style Ultraclean Up to 150 10 inch Cartridge in a 17.5 inch Capsule 3/4 inch Pillar Centered 0.03
Close [ x ]
Full Screen
687PDC
679945