Fluoroflow-HSA Pleated Membrane Filter Cartridge | All-fluoropolymer PTFE for chemical resistance in aggressive applications | Product Series

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Fluoroflow-HSA Pleated Membrane Filter Cartridge | All-fluoropolymer PTFE for chemical resistance in aggressive applications

Fluoroflow-HSA Pleated Membrane Filter Cartridge | All-fluoropolymer PTFE for chemical resistance in aggressive applications

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The Fluoroflow®-HSA pleated membrane filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow filter cartridge.

Technical Specifications

  • Brand: Parker
  • Industry: Microelectronics
  • Function: Clarification, Prefiltration, Polishing
  • Media: PTFE
  • Filter Construction: Pleated Membrane
  • End Cap Material: Fluoropolymer
  • Core Type: Fluoropolymer
  • Hose Reinforcement Material & Structure: Fluoropolymer
  • Flow Rate: 0.65 gal/min (gpm/psid) per 10 inch Cartridge Equivalent, 1.5 gal/min (gpm/psid) per 10 inch Cartridge Equivalent, 3.2 gal/min (gpm/psid) per 10 inch Cartridge Equivalent, 3.9 gal/min (gpm/psid) per 10 inch Cartridge Equivalent, 10.0 gal/min (gpm/psid) per 10 inch Cartridge Equivalent, 7.0 gal/min (gpm/psid) per 10 inch Cartridge Equivalent
Safety Warning

Full Product Description

The Fluoroflow®-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow filter cartridge. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.
Features/Benefits
• Increased filtration area for longer life
• Higher flow rates for increased bath turn over
• Wet-pack option for quick installation
• Ultraclean wet-pack option for absolute cleanliness
• All-fluoropolymer for most maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean filtration for:
–  Phosphoric acid
–  Sulfuric acid
–  Hydrofluoric acid
–  Nitric acid
–  Piranha
–  SC1, SC2
–  NMP-based solvents
• Other high temperature or ozonated process filtration

Related Documents

Literature and Reference Materials
Filtration Product Linecard for Microelectronic Applications
Fluoroflow-HSA Pleated Membrane Filter Cartridge Data Sheet
Microelectronics Filtration Applications Interactive
[PRODUCT GUIDE] Filter End Caps
Selector Guides
High-Purity Chemical Filtration Product Guide
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Products End Cap Configuration Length (inch) Micron Rating (µm) Seal Material Options Special Options
33-18804-923-5-E 222 O-Ring/Fin 4 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18804-925-5-E 222 O-Ring/Fin 4 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18804-925-5-HU 222 O-Ring/Fin 4 0.05 FEP Encapsulated Viton High Temperature (180°C Max) Ultraclean
33-18804-001-5-HU 222 O-Ring/Fin 4 0.1 FEP Encapsulated Viton High Temperature (180°C Max) Ultraclean
33-18810-923-7-EW 222 O-Ring/Fin 10 0.03 Chemraz Electronic Std. (150°C Max) Wet Packed
33-18810-925-7-EW 222 O-Ring/Fin 10 0.05 Chemraz Electronic Std. (150°C Max) Wet Packed
33-18810-925-7-HW 222 O-Ring/Fin 10 0.05 Chemraz High Temperature (180°C Max) Wet Packed
33-18810-925-6-HW 222 O-Ring/Fin 10 0.05 FEP Encapsulated Silicone High Temperature (180°C Max) Wet Packed
33-18810-001-5-EW 222 O-Ring/Fin 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18810-002-7-EW 222 O-Ring/Fin 10 0.2 Chemraz Electronic Std. (150°C Max) Wet Packed
33-18810-002-7-HW 222 O-Ring/Fin 10 0.2 Chemraz High Temperature (180°C Max) Wet Packed
33-18810-002-5-E 222 O-Ring/Fin 10 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18820-923-5-E 222 O-Ring/Fin 20 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18820-923-K-EW 222 O-Ring/Fin 20 0.03 Kalrez Electronic Std. (150°C Max) Wet Packed
33-18820-001-5-E 222 O-Ring/Fin 20 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18820-001-5-H 222 O-Ring/Fin 20 0.1 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18820-002-5-E 222 O-Ring/Fin 20 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18804-001-5-E 222 O-Ring/Fin 30 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18830-001-5-EW 222 O-Ring/Fin 30 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18830-002-5-EU 222 O-Ring/Fin 30 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) Ultraclean
33-18840-010-5-E 222 O-Ring/Fin 40 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18304-925-5-E 222 O-Ring/Flat Cap 4 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18304-925-5-HU 222 O-Ring/Flat Cap 4 0.05 FEP Encapsulated Viton High Temperature (180°C Max) Ultraclean
33-18304-001-5-E 222 O-Ring/Flat Cap 4 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18304-001-5-EW 222 O-Ring/Flat Cap 4 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18310-010-6-HW 222 O-Ring/Flat Cap 10 1 FEP Encapsulated Silicone High Temperature (180°C Max) Wet Packed
33-18310-010-5-EU 222 O-Ring/Flat Cap 10 1 FEP Encapsulated Viton Electronic Std. (150°C Max) Ultraclean
33-18310-010-5-E 222 O-Ring/Flat Cap 10 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-010-5-EW 222 O-Ring/Flat Cap 10 1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18310-010-5-H 222 O-Ring/Flat Cap 10 1 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18320-923-5-E 222 O-Ring/Flat Cap 20 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18320-923-5-EW 222 O-Ring/Flat Cap 20 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18320-925-5-EW 222 O-Ring/Flat Cap 20 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18320-001-5-EU 222 O-Ring/Flat Cap 20 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Ultraclean
33-18320-001-5-E 222 O-Ring/Flat Cap 20 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18320-001-5-EW 222 O-Ring/Flat Cap 20 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18320-001-K-E 222 O-Ring/Flat Cap 20 0.1 Kalrez Electronic Std. (150°C Max) UPW Flush & Dried
33-18320-001-4-E 222 O-Ring/Flat Cap 20 0.1 Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18320-001-4-H 222 O-Ring/Flat Cap 20 0.1 Viton High Temperature (180°C Max) UPW Flush & Dried
33-18320-002-5-E 222 O-Ring/Flat Cap 20 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18320-002-5-EW 222 O-Ring/Flat Cap 20 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18320-002-K-E 222 O-Ring/Flat Cap 20 0.2 Kalrez Electronic Std. (150°C Max) UPW Flush & Dried
33-18320-004-5-E 222 O-Ring/Flat Cap 20 0.45 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18320-010-5-E 222 O-Ring/Flat Cap 20 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18330-923-5-E 222 O-Ring/Flat Cap 30 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18330-923-5-EW 222 O-Ring/Flat Cap 30 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18330-925-5-E 222 O-Ring/Flat Cap 30 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18330-925-5-EW 222 O-Ring/Flat Cap 30 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18330-001-5-E 222 O-Ring/Flat Cap 30 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18330-001-K-E 222 O-Ring/Flat Cap 30 0.1 Kalrez Electronic Std. (150°C Max) UPW Flush & Dried
33-18330-001-K-EW 222 O-Ring/Flat Cap 30 0.1 Kalrez Electronic Std. (150°C Max) Wet Packed
33-18330-004-5-E 222 O-Ring/Flat Cap 30 0.45 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18340-010-5-E 222 O-Ring/Flat Cap 40 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18704-923-5-H 226 O-Ring/Fin 4 0.03 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18704-925-5-H 226 O-Ring/Fin 4 0.05 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18710-923-5-H 226 O-Ring/Fin 10 0.03 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18710-925-5-H 226 O-Ring/Fin 10 0.05 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18710-001-5-E 226 O-Ring/Fin 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18710-002-5-E 226 O-Ring/Fin 10 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18710-002-4-H 226 O-Ring/Fin 10 0.2 Viton High Temperature (180°C Max) UPW Flush & Dried
33-18710-004-5-E 226 O-Ring/Fin 10 0.45 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18710-004-2-E 226 O-Ring/Fin 10 0.45 S7442 Electronic Std. (150°C Max) UPW Flush & Dried
33-18710-010-5-E 226 O-Ring/Fin 10 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18720-004-5-E 226 O-Ring/Fin 20 0.45 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18720-004-4-E 226 O-Ring/Fin 20 0.45 Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18720-010-5-E 226 O-Ring/Fin 20 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18730-002-5-E 226 O-Ring/Fin 30 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18730-002-5-H 226 O-Ring/Fin 30 0.2 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18730-004-5-E 226 O-Ring/Fin 30 0.45 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18730-010-5-E 226 O-Ring/Fin 30 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18204-002-6-E 226 O-Ring/Flat Cap 4 0.2 FEP Encapsulated Silicone Electronic Std. (150°C Max) UPW Flush & Dried
33-18204-002-5-E 226 O-Ring/Flat Cap 4 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18230-004-5-H 226 O-Ring/Flat Cap 4 0.45 FEP Encapsulated Viton High Temperature (180°C Max) UPW Flush & Dried
33-18204-010-5-E 226 O-Ring/Flat Cap 4 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18304-002-5-E 222 O-Ring/Flat Cap 4 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18304-004-6-E 222 O-Ring/Flat Cap 4 0.45 FEP Encapsulated Silicone Electronic Std. (150°C Max) UPW Flush & Dried
33-18304-010-5-E 222 O-Ring/Flat Cap 4 1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18304-010-5-EW 222 O-Ring/Flat Cap 4 1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18310-923-7-E 222 O-Ring/Flat Cap 10 0.03 Chemraz Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-923-7-EW 222 O-Ring/Flat Cap 10 0.03 Chemraz Electronic Std. (150°C Max) Wet Packed
33-18310-923-5-E 222 O-Ring/Flat Cap 10 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-925-7-E 222 O-Ring/Flat Cap 10 0.05 Chemraz Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-925-7-EW 222 O-Ring/Flat Cap 10 0.05 Chemraz Electronic Std. (150°C Max) Wet Packed
33-18310-925-6-EW 222 O-Ring/Flat Cap 10 0.05 FEP Encapsulated Silicone Electronic Std. (150°C Max) Wet Packed
33-18310-925-5-E 222 O-Ring/Flat Cap 10 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-925-5-EW 222 O-Ring/Flat Cap 10 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18310-925-5-HW 222 O-Ring/Flat Cap 10 0.05 FEP Encapsulated Viton High Temperature (180°C Max) Wet Packed
33-18310-925-K-EW 222 O-Ring/Flat Cap 10 0.05 Kalrez Electronic Std. (150°C Max) Wet Packed
33-18310-001-7-EW 222 O-Ring/Flat Cap 10 0.1 Chemraz Electronic Std. (150°C Max) Wet Packed
33-18310-001-6-EW 222 O-Ring/Flat Cap 10 0.1 FEP Encapsulated Silicone Electronic Std. (150°C Max) Wet Packed
33-18310-001-5-EU 222 O-Ring/Flat Cap 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Ultraclean
33-18310-001-5-E 222 O-Ring/Flat Cap 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-001-5-EW 222 O-Ring/Flat Cap 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18310-001-5-HW 222 O-Ring/Flat Cap 10 0.1 FEP Encapsulated Viton High Temperature (180°C Max) Wet Packed
33-18310-002-6-E 222 O-Ring/Flat Cap 10 0.2 FEP Encapsulated Silicone Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-002-5-E 222 O-Ring/Flat Cap 10 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-002-5-EW 222 O-Ring/Flat Cap 10 0.2 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
33-18310-002-5-HW 222 O-Ring/Flat Cap 10 0.2 FEP Encapsulated Viton High Temperature (180°C Max) Wet Packed
33-18310-002-2-EW 222 O-Ring/Flat Cap 10 0.2 S7442 Electronic Std. (150°C Max) Wet Packed
33-18310-004-5-E 222 O-Ring/Flat Cap 10 0.45 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
33-18310-004-5-EW 222 O-Ring/Flat Cap 10 0.45 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed

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