The Fluoroflow®-XL filter cartridge is setting the new standard for exceptional flow rates and on-stream life. It utilizes a larger diameter filter cartridge (3.25˝) combined with our unique SELECT pleating technology that increases filtration area and flow rate by over 70%. This results in increased bath turnover and longer filter lifetime demanded by today’s advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.
Benefits
• Extra-large filtration area for longer life
• Highest flow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality
Applications
• Wet etch and clean filtration
– Phosphoric acid
– Sulfuric acid
– Hydrofluoric acid
– Nitric acid
– Piranha
– SC1, SC2
– NMP-based solvents
• Other high temperature or ozonated process Filtration