UHP Single Stage, High Flow, Pressure Reducing Regulator - FR1400 Series | Product Series

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Outlet Pressure

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UHP Single Stage, High Flow, Pressure Reducing Regulator - FR1400 Series UHP Single Stage, High Flow, Pressure Reducing Regulator - FR1400 Series

UHP Single Stage, High Flow, Pressure Reducing Regulator - FR1400 Series

Where to Buy

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

Technical Specifications

  • Flow Coefficient: 0.5 Cv
  • Maximum Inlet Pressure Rating: 3000, 300 psig
  • Outlet Pressure Rating: 100mm Hg-30 psig, 1-30 psig, 5-60 psig, 10-100 psig, 15-150 psig
  • Seat Material: PCTFE, Polyimide
  • Number of Ports: 2, 3, 4
  • Port Type: 3/8" Face Seal, 1/2" Face Seal, 1/2" Tube Stub
  • Port Connection: Male, Male, Female, Female
  • Body Material: 316L Stainless Steel, 316L Stainless Steel Double Melt
  • Diaphragm Material: Hastelloy C-22®
  • Poppet Material: Hastelloy C-22®, Spring: Inconel®
  • Seat Retainer Material: 316L SS, Hastelloy C-22®
  • Internal Leak Rate: 4 x 10-8 scc/sec He
  • External Leak Rate: 2 x 10-10 scc/sec He
  • Proof Pressure: 4500 psig
  • Burst Pressure: 9000 psig
Safety Warning

Full Product Description

Veriflo Division’s FR1400 Series regulators are tied diaphragm, single stage, pressure reducing regulators that offer high flow capability with an inlet pressure up to 3000 psig. They are an excellent choice for cylinder or point of use bulk and specialty gas applications.
The large, tied Hastelloy C-22® diaphragm provides stable control over its full operational range while providing a robust seal for hazardous gas applications.
The FR1400 Series offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new FR line will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Fab Installations
• Gas Companies

Product Features:
• 316L stainless steel body
• Manufactured for ultra high purity semiconductor gas applications
• Metal-to-metal diaphragm seal
• 10 μ in. Ra surface finish
• Passivated & electropolish
• Tied diaphragm design
• Hastelloy C-22® diaphragm standard
• Flow capacity: 0.5 Cv
• Flows up to 800 slpm (28 scfm)

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Gas Cabinets
• “Point of Use” pressure regulation

Related Documents

Product Demos & Tutorials
Veriflo FR Series Regulators Introduction Video
Literature and Reference Materials
Semiconductor Regulator Selection White Paper
Veriflo CAD File Locator Guide
Veriflo Product Selection & Operation Safety Guide
Process Analytical Products Guide - CAT4255-PA
Veriflo Pressure Regulators - Installation, Operation and Recycling Guide
Veriflo--FR1400 Flow Curve
Veriflo--FR1400 Series - Technical Data Sheet
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Products Maximum Inlet Pressure (psig) Outlet Pressure Body Material Flow Coefficient (Cv) Seat Material Number of Ports Port Connection Port Connection Type
FR1406LD5V2PFS6MM 300 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1410LD5V2PFS6MM 300 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1415LD5V2PFS6MM 300 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1403LD5V2PFS8FF 300 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1406LD5V2PFS8FF 300 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1410LD5V2PFS8FF 300 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1415LD5V2PFS8FF 300 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1403LD5V2PFS8MM 300 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1406LD5V2PFS8MM 300 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1410LD5V2PFS8MM 300 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1415LD5V2PFS8MM 300 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1403HS5K2PFS6MM 3000 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1406HS5K2PFS6MM 3000 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1410HS5K2PFS6MM 3000 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1415HS5K2PFS6MM 3000 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1403LS5K2PFS6MM 300 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1406LS5K2PFS6MM 300 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1410LS5K2PFS6MM 300 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1415LS5K2PFS6MM 300 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1403HS5K2PFS6FF 3000 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1406HS5K2PFS6FF 3000 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1410HS5K2PFS6FF 3000 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1415HS5K2PFS6FF 3000 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1403LS5K2PFS6FF 300 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1406LS5K2PFS6FF 300 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1410LS5K2PFS6FF 300 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1415LS5K2PFS6FF 300 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1403HS5K2PFS8MM 3000 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1406HS5K2PFS8MM 3000 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1410HS5K2PFS8MM 3000 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1415HS5K2PFS8MM 3000 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1403LS5K2PFS8MM 300 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1406LS5K2PFS8MM 300 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1410LS5K2PFS8MM 300 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1415LS5K2PFS8MM 300 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1403HS5K2PFS8FF 3000 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1406HS5K2PFS8FF 3000 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1410HS5K2PFS8FF 3000 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1415HS5K2PFS8FF 3000 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1403LS5K2PFS8FF 300 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1406LS5K2PFS8FF 300 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1410LS5K2PFS8FF 300 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1415LS5K2PFS8FF 300 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1403HS5K2PTS8MM 3000 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1406HS5K2PTS8MM 3000 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1410HS5K2PTS8MM 3000 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1415HS5K2PTS8MM 3000 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1403LS5K2PTS8MM 300 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1406LS5K2PTS8MM 300 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1410LS5K2PTS8MM 300 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1415LS5K2PTS8MM 300 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Male, Male 1/2" Tube Stub
FR1403HS5K2PTS8FF 3000 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1406HS5K2PTS8FF 3000 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1410HS5K2PTS8FF 3000 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1415HS5K2PTS8FF 3000 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1403LS5K2PTS8FF 300 1-30 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1406LS5K2PTS8FF 300 5-60 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1410LS5K2PTS8FF 300 10-100 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1415LS5K2PTS8FF 300 15-150 psig 316L Stainless Steel 0.5 PCTFE 2 Female, Female 1/2" Tube Stub
FR1403HD5V2PFS6FF 3000 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1406HD5V2PFS6FF 3000 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1410HD5V2PFS6FF 3000 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1415HD5V2PFS6FF 3000 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1403HD5V2PFS6MM 3000 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1406HD5V2PFS6MM 3000 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1410HD5V2PFS6MM 3000 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1415HD5V2PFS6MM 3000 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal
FR1403HD5V2PFS8FF 3000 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1406HD5V2PFS8FF 3000 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1410HD5V2PFS8FF 3000 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1415HD5V2PFS8FF 3000 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 1/2" Face Seal
FR1403HD5V2PFS8MM 3000 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1406HD5V2PFS8MM 3000 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1410HD5V2PFS8MM 3000 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1415HD5V2PFS8MM 3000 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 1/2" Face Seal
FR1403LD5V2PFS6FF 300 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1406LD5V2PFS6FF 300 5-60 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1410LD5V2PFS6FF 300 10-100 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1415LD5V2PFS6FF 300 15-150 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Female, Female 3/8" Face Seal
FR1403LD5V2PFS6MM 300 1-30 psig 316L Stainless Steel Double Melt 0.5 PCTFE 2 Male, Male 3/8" Face Seal

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