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Vacuum Pump Inlet Filters prevent oil back streaming from the pump to the evacuated chamber and protect the pump from damage by submicron particles
| Products | Application Type | Vacuum Range | Maximum Flow Rate (cfm) |
|---|---|---|---|
| CF-0112-102 | Hazardous/Corrosive | Service to 10 -6 Torr | 3 |
| CF-0118-102 | Hazardous/Corrosive | Service to 10 -6 Torr | 9 |
| CV-0112-30 | Hazardous/Corrosive | Service to 2 Torr | 3 |
| CV-0118-30 | Hazardous/Corrosive | Service to 2 Torr | 9 |
| R-009-30 | Nonhazardous/Noncorrosive | Service to 2 Torr | 9 |
| R-015-30 | Nonhazardous/Noncorrosive | Service to 2 Torr | 15 |