Fluoroflow-XL Membrane Filter Cartridge | All-fluoropolymer PTFE Membrane with Select Pleat Technology | Série de produits

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Configuration de l'embout

Longueur (po)

Seuil de filtration (µm)

Matériau du joint

Température nominale maxi. (C)

Options

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Fluoroflow-XL Membrane Filter Cartridge | All-fluoropolymer PTFE Membrane with Select Pleat Technology

Fluoroflow-XL Membrane Filter Cartridge | All-fluoropolymer PTFE Membrane with Select Pleat Technology

The Fluoroflow-XL all-fluoropolymer PTFE membrane filter cartridge utilizes a larger diameter cartridge combined with select pleat technology to increase filtration area and flow rate by over 70% in aggressive applications up to 180 °C.

Caractéristiques techniques

  • Marque : Parker
  • Secteur : Microelectronics
  • Fonction : Clarification, Prefiltration, Polishing
  • FluideMédia : PTFE
  • Construction du filtre : Pleated Membrane
  • Matériau de l'embout : Fluoropolymer
  • Type de noyau : Fluoropolymer
  • Structure et matériau de renfort du flexible : Fluoropolymer
  • Diamètre extérieur : 3.25 inch
  • Débit : 13.0GPM/PSID per 10 inch cartridge equivalent, 1.4GPM/PSID per 10 inch cartridge equivalent, 3.3GPM/PSID per 10 inch cartridge equivalent
Safety Warning

Description complète du produit

The Fluoroflow®-XL filter cartridge is setting the new standard for exceptional flow rates and on-stream life. It utilizes a larger diameter filter cartridge (3.25˝) combined with our unique SELECT pleating technology that increases filtration area and flow rate by over 70%. This results in increased bath turnover and longer filter lifetime demanded by today’s advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.
Benefits
• Extra-large filtration area for longer life
• Highest flow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality
Applications
• Wet etch and clean filtration
– Phosphoric acid
– Sulfuric acid
– Hydrofluoric acid
– Nitric acid
– Piranha
– SC1, SC2
– NMP-based solvents
• Other high temperature or ozonated process Filtration

Documents annexes

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Produits Configuration de l'embout Longueur (po) Seuil de filtration (µm) Matériau du joint Température nominale maxi. (C) Options
FL-18310-031-5-E 222 O-Ring/Flat cap 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
FL-18310-031-5-EU 222 O-Ring/Flat cap 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Ultraclean & Pre-wet
FL-18310-031-5-EW 222 O-Ring/Flat cap 10 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
FL-18310-031-5-HU 222 O-Ring/Flat cap 10 0.1 FEP Encapsulated Viton High Temperature (180°C Max) Ultraclean
FL-18310-031-5-HW 222 O-Ring/Flat cap 10 0.1 FEP Encapsulated Viton High Temperature (180°C Max) Wet Packed
FL-18330-031-5-E 222 O-Ring/Flat cap 30 0.1 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
FL-18310-923-5-E 222 O-Ring/Flat cap 10 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
FL-18320-923-5-EU 222 O-Ring/Flat cap 20 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) Ultraclean & Pre-wet
FL-18320-923-5-EW 222 O-Ring/Flat cap 20 0.03 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
FL-18310-925-5-E 222 O-Ring/Flat cap 10 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) UPW Flush & Dried
FL-18310-925-5-EW 222 O-Ring/Flat cap 10 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
FL-18310-925-5-HW 222 O-Ring/Flat cap 10 0.05 FEP Encapsulated Viton High Temperature (180°C Max) Wet Packed
FL-18310-925-K-E 222 O-Ring/Flat cap 10 0.05 Kalrez Electronic Std. (150°C Max) UPW Flush & Dried
FL-18320-925-5-EW 222 O-Ring/Flat cap 20 0.05 FEP Encapsulated Viton Electronic Std. (150°C Max) Wet Packed
FL-18330-925-K-EW 222 O-Ring/Flat cap 30 0.05 Kalrez Electronic Std. (150°C Max) Wet Packed

687PDC
679945